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반도체장비
NDS-4200/5200
Full Automatic Dicing Saw – NDS-4200/5200
Full-Automatic Dicing Series..
- NEONTECH’s unique facing dual dicing design was combined with well known dicing function to maximize productivity.
Powerful Dicing Engine
- By selecting 2.4kW high torgue spindle, hard dicing material such as ceramic, thick metal and silicon can be processed.
System Stability
- NEONTECH’s unique design : granite base bridge-structure is optimized for vibration minimization, high ridigity and stability.
User Interface
- Multi language such as Korea / English / Chinese / Japanese is provided for user’s convenience. Also, system provide wide(17”) touch monitor
Large Working Chuck Table
- NDS-4200 is optimized for Ø8” or 210mm. NDS-5200 is optimized for large 300 sq. More multiple piece loading per ring frame is available. It can provide more longer loading/unloading interval for more dicing time. Also, large chuck table can be able to minimize operator help and UV tape consumption.
상세설명
SPECIFICATIONS
| Items | NDS-4200 | NDS-5200 | |
| Material Size | ø8”(Max. ø200mm) | ø12”(Max. ø300mm) | |
| X-axis (Dicing) |
Stroke | 400mm | 500mm |
| Cutting Range | 0.01~300mm | 0.01~300mm | |
| Cutting Speed | 0.01~400mm/sec. | ||
| Min. Step | 1㎛ | ||
| Y1/Y2-axis (Index) |
Stroke | 250mm | 350mm |
| Indexing Range | 0.0001~210mm | 0.0001~310mm | |
| Indexing Speed | 100mm/sec | ||
| Y-single Pitch Error | 0.001mm/5mm | ||
| Y-positioning Error | 0.002mm/200mm | 0.002mm/300mm | |
| Min. Step | 0.1㎛ | 0.1㎛ | |
| Z1/Z2-axis | Stroke | 40mm | |
| Min. Step | 0.1㎛ | ||
| Θ-axis | Rotation Angle | 380° (CCW 320° , CW 60°) | |
| Angular Resolution | 0.000176° | ||
| Repeatability | ±0.000176° | ||
