Business
Business
Dicing Saw
반도체장비
NDS-6061/1612
Semi Automatic Dicing Series for System Flexibility
Main Features
- Material manual loading/unloading fully automatic dicing process(vision align/dicing/blade control) separated spin cleaning/dry process
Powerful Dicing Engine
- By selecting 2.4kW high torgue spindle, hard dicing material such as ceramic, thick metal and silicon can be processed.
System Stability
- NEONTECH’s unique design : granite base bridge-structure is optimized for vibration minimization, high ridigity and stability.
User Interface
- Multi language such as Korea / English / Chinese / Japanese is provided for user’s convenience. Also, system provide wide(17”) touch monitor
Large Working Chuck Table
- NDS-1012 is optimized for Ø8” or 210mm. NDS1612 is optimized for large 300 sq. More multiple piece loading per ring frame is available. It can provide more longer loading/unloading interval for more dicing time. Also, large chuck table can be able to minimize operator help and UV tape consumption.
상세설명
SPECIFICATIONS
| Items | NDS-6061 | NDS-1612 | |
| Chuck Size | ø150 | 300 x 300mm | |
| X-axis (Dicing) |
Stroke | 170mm | 320mm |
| Cutting Range | 0.01~150mm | 0.01~300mm | |
| Cutting Speed | 0.01~300mm/sec. | ||
| Min. Step | 1㎛ | ||
| Y-axis (Index) |
Stroke | 170mm | 320mm |
| Indexing Range | 0.0001~170mm | 0.0001~310mm | |
| Indexing Speed | 100mm/sec | ||
| Y-single Pitch Error | 0.001mm/5mm | ||
| Y-positioning Error | 0.003mm/170mm | 0.003mm/300mm | |
| Min. Step | 0.1㎛ | 0.1㎛ | |
| Z-axis | Stroke | 40mm | |
| Min. Step | 0.1㎛ | ||
| Θ-axis | Rotation Angle | 380° (CCW 320° , CW 60°) | |
| Angular Resolution | 0.000176° | ||
| Repeatability | ±0.000176° | ||