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Business
ETC
반도체장비
NUV Series
Manual UV Curing System
NUV-68
- Ultra violet curing system for easy chip separation of mechanical dicing application
Work Flow
- Mechanical dicing(NEON NDS series) → UV → Light radiation → UV curing(hardening) → Chip separation
Main Features
- 6”, 8” compatible
- 352nm wavelength light
- Lamp life : 3,000H
- Touch screen user interface
- Easy UV LAMP change
- UV lamp intensity control function
- Auto sliding tray
상세설명
SPECIFICATIONS
| No. | Items | NUV-68 |
| 1 | Work size | 6”~ 8” wafer ring frame |
| 2 | N2 Gas Pressure | 3kg/cm2 |
| 3 | N2 Gas flow | 1 l/m (adjustable) |
| 4 | UV lamp | UV-A |
| 5 | Wavelength | 352 nm |
| 6 | Size (W x D x H) | 440 x 560 x 240mm |
| 7 | Weight | 25 Kg |
| 8 | Lamp power | 8W X 11 Line |
| 9 | Lamp life time | 3000 Hr |
| 10 | Power supply | 220V 60Hz 15A |
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