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반도체장비

NEX Series

Wafer Expander System

NEX-8

  • Wafer expanding system to get more space between each chips.

Work Flow

  • Inner Hoop ring loading (Plate) → Loading (Ring Frame & material) → Outer Hoop ring loading (Upper cover) → Locking → Z-axis up → Expanding → Unloading

System Main Features

  • 8”Ring Frame /GRP-8 Hoop Ring.
  • No need air and vacuum.
  • Up/down height control using stepping motor.
  • Touch screen user interface
  • Multi-language user interface (Korean/English/ Chinese/Japanese)

상세설명

SPECIFICATIONS

6P/N P/N IDØA ODØB T
GRP-4 Ø140/Ø146 Ø146/Ø152 6
GRP-5 Ø170/Ø178 Ø178/Ø186 6
GRP-6 Ø195/Ø203 Ø203/Ø210 6
GRP-8 Ø225/Ø233 Ø233/Ø241