Business
반도체장비
NEX Series
Wafer Expander System
NEX-8
- Wafer expanding system to get more space between each chips.
Work Flow
- Inner Hoop ring loading (Plate) → Loading (Ring Frame & material) → Outer Hoop ring loading (Upper cover) → Locking → Z-axis up → Expanding → Unloading
System Main Features
- 8”Ring Frame /GRP-8 Hoop Ring.
- No need air and vacuum.
- Up/down height control using stepping motor.
- Touch screen user interface
- Multi-language user interface (Korean/English/ Chinese/Japanese)
상세설명
SPECIFICATIONS
| 6P/N | P/N IDØA | ODØB | T |
| GRP-4 | Ø140/Ø146 | Ø146/Ø152 | 6 |
| GRP-5 | Ø170/Ø178 | Ø178/Ø186 | 6 |
| GRP-6 | Ø195/Ø203 | Ø203/Ø210 | 6 |
| GRP-8 | Ø225/Ø233 | Ø233/Ø241 |

