Business
Business
ETC
반도체장비
NSD Series
Semi Automatic Spin Cleaning System
NSD-68
- Particle / contamination cleaning system using high speed spinning & DI water
- Built-in high pressure atomizer, sponge & Nylon brush.
Work Flow
- Material loading → Spin & atomizer cleaning → Brush cleaning(if need) → DI water washing → Air dry → Spin dry → Unloading
Main Features
- Support various chuck design & size (Up to 12”)
- Programmable cleaning recipe (Max 7-step cleaning mode)
- Maximum RPM : 2,000rpm
- Manual material loading & unloading
- Material holding : vacuum & clamp
상세설명
SPECIFICATIONS
| No. | Items | Specifications |
| 1 | Material Size | Up to 12” |
| 2 | Controller | PLC with touch UI |
| 3 | Spinning Motor | AC servo 400W |
| 4 | Typical RPM | 500 ~ 2000 rpm |
| 5 | Nozzle #1 | High pressure atomizer |
| 6 | Nozzle #2 | Atomizer or brush |
| 7 | Nozzle Moving Motor | Stepping motor |
| 8 | Nozzle Moving Parameter | Speed & angle |
| 9 | Dimension(W x D x H) | 650 x 1,100 x 1,250mm |
| 10 | Water Consumption | 1~2 liter/min |
| 11 | Air Consumption | 200 liter/min |
| 12 | Air Pressure | 0.4 ~ 0.6 MPa |
| 13 | Electricity | 220V Single Phase 50/60Hz 15A |
Substrate & Dual Nozzle
Square Type with Brush
Circle Type with Brush
